Fabrication

1. ECE 595AL: Advanced Lithography Link: https://nanohub.org/resources/32642
2. ECE 695Q: Nanometer Scale Patterning and Processing Link: nanoHUB.org – Resources: ECE 695Q: Nanometer Scale Patterning and Processing: About
3. How Photolithography works DUV and EUV Basics from Zeiss Link: How Photolithography works | Part 1/6 – Introduction
4. ME 598: Nanoscale Fabrication & Characterization Link: nanoHUB.org – Resources: ME 598: Nanoscale Fabrication & Characterization: About
5. Computational Lithography Siemens and Synopsis EDA Link:Computational lithography | ASML Link:cuLitho – Accelerate Computational Lithography | NVIDIA Developer and Accelerating Computational Lithography & Chip Design with NVIDIA | Synopsys Blog